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Abstract
Pneumatic drive bellows pumps (PDBPs) are a crucial fluid control component in the semiconductor industry. However, when dealing with specific chemical mechanical polishing (CMP) slurries, agglomeration of particles can occur, leading to scratches, particle residues, pits, and other defects on the wafer surface. The leading cause of agglomeration has been proposed to be cavitation and excessive shear in PDBPs. A high-fidelity multiphase computational fluid dynamics (CFD) model, which fully resolves the response of check valves under hydrodynamic and other external loads, was established to evaluate cavitation behaviour and shear distribution in PDBPs. Moreover, a test rig was built to visualize cavitating flow patterns in PDBPs and verify the accuracy of the CFD model. Among different cavitation regions captured by high-speed visualization, the region near the inner leading edge of the end-ring of the inlet valve is dominant, with high intensity, long duration, and complex morphology evolution. Detailed initiation and development process of cavities in the dominant region are analysed numerically. The shear rate in different domains of PDBPs is estimated, and the inlet valve domain stands out from the other. The strongest shear rate is observed near the leading edge of the end-ring. Furthermore, an analysis of the relationship between cavitation and shear indicates that the high-intensity vortices generated owing to strong shear account for the inception of cavitation. This study contributes to understanding inner flow details in PDBPs and provides a guideline for further optimization of similar pumps.
Acknowledgements
Special thanks to Yifan Wu from Hamilton College for revisions on English language and grammar.
Disclosure statement
No potential conflict of interest was reported by the author(s).