Characterization of remote N₂ plasma by various techniques

Abstract

The distribution of electron temperature (Te), electron density (Ne) in a remote N₂ plasma was studied with the help of emission spectroscopy, Langmuir probe diagnostic techniques. The results show that the characteristic peaks were concentrated in the spectral range of 280–440 nm, whereas NIII spectral lines were dominant. The Te varies with RF power, gas pressure and axial distance. The electronic temperature decreases as the RF power rises from 20 to 100 W. When the pressure increases from 15 to 35 Pa, the Te increases at first and then decreases. For the given RF power and pressure, the Te in the discharge area increases and the Te in the remote area decreases with the increase of the axial distance. The Ne in the remote N₂ plasma was of the order of 10E15cm⁻³. The Ne increases when the RF power increases and decreases with the increase of the pressure and axial distance.

KEYWORDS:

• Emission spectroscopy
• Langmuir probe
• electron temperature
• electron density

Disclosure statement

No potential conflict of interest was reported by the author(s).

Additional information

Funding

This work was supported by the National Natural Science Foundation of China [grant number 11105102]; the science and technology overall innovation project plan project of Shaanxi province(2011KTCL01-12); Natural Science Basic Research Plan in Shaanxi Province of China (2022JM-142).

Notes on contributors

Xin Yang

Xin Yang mainly engaged in plasma diagnosis and plasma modification research.

Ru Li

Ru Li mainly engaged in plasma diagnosis and plasma modification research.

Qianyun Xing

Qianyun Xing mainly engaged in plasma diagnosis and plasma modification research.

Yu Zhang

Yu Zhang mainly engaged in plasma diagnosis and plasma modification research.