Fabrication of carbon nanomaterials using pulse microplasma in SEM

Q. Zou State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. ChinaCorrespondence[email protected]

M. Z. Wang State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China

Y. G. Li State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China

L. H. Zhou State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China

Abstract

Synthesis of carbon nanomaterials by pulse microplasma in the chamber of a scanning electron microscope equipped with a special discharge cell is reported. The peak current density of the methane microplasma was higher than 5 kA cm⁻², and the pulse width was almost 10 ns. After 5 s operation, there could be observed some carbon nanomaterials deposited on the cathode of the platinum film besides melted spots.

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Fabrication of carbon nanomaterials using pulse microplasma in SEM

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