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Plasma Devices and Operations Volume 17, 2009 - Issue 3
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Original Articles

Fabrication of carbon nanomaterials using pulse microplasma in SEM

Q. Zou State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. ChinaCorrespondence[email protected]
,
M. Z. Wang State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China
,
Y. G. Li State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China
&
L. H. Zhou State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao, Hebei, 066004, P.R. China
Pages 175-180 | Received 06 Jan 2009, Published online: 19 Jun 2009
 
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Abstract

Synthesis of carbon nanomaterials by pulse microplasma in the chamber of a scanning electron microscope equipped with a special discharge cell is reported. The peak current density of the methane microplasma was higher than 5 kA cm−2, and the pulse width was almost 10 ns. After 5 s operation, there could be observed some carbon nanomaterials deposited on the cathode of the platinum film besides melted spots.

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