Abstract
Microplasma was produced in argon gas in a scanning electron microscope at near-atmospheric pressure using a multi-wall carbon nanotube (CNT) film as a cathode. It is demonstrated that with the CNT film used as a cathode, the breakdown voltage was much lower than the breakdown voltage when the conventional cathode made of flat metal film was used and the discharge was highly reproducible. These features of the gas discharge are defined by the field emission from the CNT cathode.