Generation of microplasma using multiwall carbon nanotubes cathode

References

• Meng , L. G. , Liu , C. L. , Liang , H. F. and Liang , Z. H. 2008 . Microplasma array devices with coplanar electrodes operating in neon . Phys. Lett. A , 372 : 6504 – 6508 .
   Google Scholar
• Tomai , T. , Katahira , K. , Kubo , H. , Shimizu , Y. , Sasaki , T. , Koshizaki , N. and Terashima , K. 2007 . Carbon materials syntheses using dielectric barrier discharge microplasma in supercritical carbon dioxide environments . J. Supercrit. Fluids , 41 : 404 – 411 .
   Google Scholar
• Awad , S. H. and Qian , H. C. 2006 . Deposition of duplex Al2O3/TiN coatings on aluminium alloys for tribological applica- tions using a combined microplasma oxidation (MPO) and arc ion plating (AIP) . Wear , 260 : 215 – 222 .
   Web of Science ®Google Scholar
• Yang , Z. S. , Shirai , H. , Kobayashi , T. and Hasegawa , Y. 2007 . Synthesis of Si nanocones using rf microplasma at atmospheric pressure . Thin Solid Films , 515 : 4153 – 4158 .
   Web of Science ®Google Scholar
• Ideno , T. and Ichiki , T. 2006 . Maskless etching of microstructures using a scanning microplasma etcher . Thin Solid Films , 506–507 : 235 – 238 .
   Google Scholar
• Kanazawa , S. , Daidai , R. , Akamine , S. and Ohkubo , T. 2008 . Generation of microplasma jet at atmospheric pressure using a modified waveguide-based plasma torch . Surf. Coat. Technol. , 202 : 5275 – 5279 .
   Google Scholar
• Pérez-Martíneza , J. A. , Peña-Eguiluzb , R. , López-Callejas , R. , Mercado-Cabrera , A. , Valencia , R. A. , Barocio , S. R. , Benítez-Read , J. S. and Pacheco-Sotelo , J. O. 2007 . An RF microplasma facility development for medical applications . Surf. Coat. Technol. , 201 : 5684 – 5687 .
   Google Scholar
• Guchardi , R. and Hauser , P. C. 2004 . Capacitively coupled microplasma for on-column detection of chromatographically separated inorganic gases by optical emission spectrometry . J. Chromatogr. A , 1033 : 333 – 338 .
   PubMed Web of Science ®Google Scholar
• Hozumi , Y. , Seto , T. , Hirasawa , M. , Tsuji , M. and Okuyama , A. 2008 . Kinetics of microplasma atmospheric ion generation correlated with discharge current . J. Electrostatics , 67 : 1 – 6 .
   Google Scholar
• Michels , A. , Tombrink , S. , Vautz , W. , Miclea , M. and Franzke , J. 2007 . Spectroscopic characterization of a microplasma used as ionization source for ion mobility spectrometry . Spectrochim. Acta B , 62 : 1208 – 1215 .
   Web of Science ®Google Scholar
• Son , S.-Y. , Lee , Y. , Lee , D.-H. , Kim , S.-D. , Sung , S.-H. , Hong , S.-Y. and Cho , S.-J. 2008 . Field emission property of multi-walled carbon nanotubes with different carbon sources in a fluidized bed reactor . J. Phys. Chem. Solids , 69 : 1188 – 1193 .
   Google Scholar
• Liao , Q. L. , Zhang , Y. , Qi , J. J. , Huang , Y. H. , Gao , Z. J. , Xia , L. S. and Yan , X. Q. 2008 . Field emission properties of a carbon nanotube cathode in different electric field modes . Mater. Lett. , 62 : 1941 – 1944 .
   Google Scholar
• Chen , T. , Wang , L. L. , Chen , Y. W. , Que , W. X. and Sun , Z. 2007 . Field emission properties of carbon nanotubes film grown on NiCr alloy films . Appl. Surf. Sci. , 253 : 7046 – 7049 .
   Google Scholar
• Jang , H. S. , Lee , H.-R. and Kim , D.-H. 2006 . Field emission properties of carbon nanotubes with different morphologies . Thin Solid Films , 500 : 124 – 128 .
   Google Scholar
• Wang , Y. Y. , Gupta , S. , Garguilo , J. M. , Liu , Z. J. , Qin , L. C. and Nemanich , R. J. 2005 . Growth and field emission properties of small diameter carbon nanotube films . Diam. Relat. Mater. , 14 : 714 – 718 .
   Google Scholar
• Park , S.-J. , Eden , J. G. and Park , K-H. 2004 . Carbon nanotube-enhanced performance of microplasma devices . Appl. Phys. Lett. , 84 : 4481 – 4483 .
   Google Scholar
• Park , S.-J. and Eden , J. G. 2003 . Electrical characteristics and lifetimes of microdischarge devices having thin dielectric films of aluminum oxide, boron nitride, or barium titanate . Electron. Lett. , 39 : 773 – 774 .
   Google Scholar
• Chen , J. , Park , S.-J. , Fan , Z. , Eden , J. G. and Liu , C. 2002 . Development and characterization of micromachined hollow cathode plasma display devices . J. Microelectromech. Syst. , 11 : 536 – 543 .
   Google Scholar
• Kim , K. S. , Park , S.-J. and Eden , J. G. 2007 . Self-patterned aluminum interconnects and ring electrodes for arrays of microcavity plasma devices encapsulated in Al2O3 . J. Phys. D Appl. Phys. , 41 : 1
   Google Scholar
• Park , S.-J. , Tchertchian , P. A. , Sung , S.-H. , Spinka , T. M. and Eden , J. G. 2007 . Arrays of addressable microcavity plasma devices . IEEE Trans. Plasma Sci. , 35 : 215 – 222 .
   Google Scholar
• Seo , J. H. and Eden , J. G. 2006 . Two-dimensional simulation of AC-driven microplasmas confined to 100–300 μ m diameter cylindrical microcavities . J. Appl. Phys. , 100 : 123302
   Google Scholar
• Lim , K. S. , Kim , T. L. , Yoon , J. K. , Park , S.-J. and Eden , J. G. 2009 . Control of cavity cross-section in microplasma devices: Luminance and temporal response of 200×100 and 320×160 arrays with parabolic Al2O3 microcavities . Appl. Phys. Lett. , 94 : 11503 – 11505 .
   Google Scholar
• Eden , J. G. , Park , S.-J. , Ostrom , N. P. and Chen , K.-F. 2005 . Recent advances in microcavity plasma devices and arrays: A versatile photonic platform . J. Phys. D Appl. Phys. , 38 : 1644 – 1648 .
   Google Scholar
• Park , S.-J. and Eden , J. G. 2005 . Stable microplasmas in air generated with a silicon inverted pyramid plasma cathode . IEEE Trans. Plasma Sci. , 33 : 570 – 571 .
   Google Scholar
• Hatta , A. , Kawata , K. , Watamori , M. and Jinno , M. 2006 . High-efficient production methods of micro-plasma using nano-sized-structured and active-functional electrodes , Vol. 3 , 31 – 40 . Kyoto University . Annual Progress Report
   Google Scholar
• Tong , L. , Yonemura , S. , Takana , H. and Nishiyama , H. 2007 . Effect of configuration on microdischarge structure in a narrow channel . Phys. Lett. A , 371 : 140 – 144 .
   Google Scholar