Chemical use in the semiconductor manufacturing industry

References

• Aftalion F. The chemical revolution. In: Aftalion F, editor. A history of the international chemical industry. USA: Chemical Heritage Foundation; 2001. p. 15–16.
   Google Scholar
• Courtney D. Health hazards of soft soldering in the electronics industry. Rev Environ Health. 1984;5(1):1–26.
   Google Scholar
• Chelton CF, Glowatz M, Mosovsky JA. Chemical hazards in the semiconductor industry. IEEE Trans Edu. 1991;34(3):269–288.
   Web of Science ®Google Scholar
• Harrison M. Semiconductor manufacturing hazards. In: Krieger GR, editor. Hazardous materials toxicology: clinical principles of environmental health. USA: Williams & Wilkins; 1992. p. 472–504.
   Google Scholar
• Yoon CS. Much concern but little research on semiconductor occupational health issues. J Korean Med Sci. 2012;27(5):461–464.
   PubMed Web of Science ®Google Scholar
• Edelman P. Environmental and workplace contamination in the semiconductor industry: implications for future health of the workforce and community. Environ Health Persp. 1990;86:291–295.
   PubMed Web of Science ®Google Scholar
• Lin CP, Chang HK, Chang YM, et al. Emergency response study for chemical releases in the high-tech industry in Taiwan—A semiconductor plant example. Process Saf Environ. 2009;87(6):353–360.
   Web of Science ®Google Scholar
• Wald PH, Jones JR. Semiconductor manufacturing: an introduction to processes and hazards. Am J Ind Med. 1987;11(2):203–221.
   PubMed Web of Science ®Google Scholar
• Kong JO. Working environment and experiences of diseases in semiconductor industry. J Korean Soc Occup Environ Hyg. 2012;22(1): 32–41. Korean.
   Google Scholar
• Ladou J, Bailar JC. Cancer and reproductive risks in the semiconductor industry. Int J Occup Env Heal. 2007;13(4):376–385.
   PubMed Web of Science ®Google Scholar
• Lee JH, Lee KS, Park JW, et al. A study on the actual conditions of trade secrets in the MSDS and the improvement. J Korean Soc Occup Environ Hyg. 2011;21(3):128–138. Korean.
   Google Scholar
• Bowden M, Thompson L, Fahrenholtz S, et al. A sensitive novolac‐based positive electron resist. J Electrochem Soc. 1981;128(6):1304–1313.
   Web of Science ®Google Scholar
• Park DU, Byun HJ, Choi SJ, et al. Review on potential risk factors in wafer fabrication process of semiconductor industry. Korean J Occup Environ Med. 2011;23(3):333–342. Korean.
   Google Scholar
• O’brien MJ. Novolac‐based photoresists combining chemical amplification and dissolution inhibition. Polym Eng Sci. 1989;29(13):846–849.
   Web of Science ®Google Scholar
• Choi NU, Park SB, Moon SS, et al. Surface and interface properties of polymers in semiconductor application. Polym Sci Technol. 2006;17(2):182–190. Korean.
   Google Scholar
• Kim ST, Yang DS, Park HW, et al. Technology of semiconductor industry and development of photoresist. Polym Sci Technol. 2005;16(1):4–19. Korean.
   Google Scholar
• Park SH, Park HD, Shin IJ. Exposure characteristics for chemical substances and work environmental management in the semiconductor assembly process. J Korean Soc Occup Environ Hyg. 2014;24(3): 272–280. Korean.
   Google Scholar
• Gaffney SH, Paustenbach DJ. A proposed approach for setting occupational exposure limits for sensory irritants based on chemosensory models. Ann Occup Hyg. 2007;51(4):345–356.
   PubMed Web of Science ®Google Scholar
• Park SH, Shin JA, Park HD. Exposure possibility to by-products during the processes of semiconductor manufacture. J Korean Soc Occup Environ Hyg. 2012;22(1): 52–59. Korean.
   Google Scholar
• Hong WS, Kim KB. Tafel characteristics by electrochemical reaction of SnAgCu Pb-free solder. Korean J Mater Res. 2005;15(8): 536–542. Korean.
   Google Scholar
• Gassert T. Etching and plating. In: Gassert T, editor. Health hazards in the electronics industry: A handbook. Switzerland: International Metalworkers’ Federation Asia Monitor Resource Center; 1985. p. 42–47.
   Google Scholar
• KOSHA. Survey on the distribution and use of chemicals: sulfuric acid. Korea: Korea Occupational Safety and Health Agency; 2010.
   Google Scholar
• Park HH, Jang JK, Shin JA. Quantitative exposure assessment of various chemical substances in a wafer fabrication industry facility. Saf Health Work. 2011;2(1):39–51.
   PubMedGoogle Scholar
• Lasssiter DV, Stewart JH. Injury and illness of semiconductor workers: experience and epidemiologic studies. In: Bolmen RA, editor. Semiconductor safety handbook: safety and health in the semiconductor industry. USA: William Andrew; 1998. p. 48–53.
   Google Scholar