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Article

Study on Thermal Effect on the SEM Contrast of a Nanorod in a Fast Scanning Mode

References

  • Achour, S. 1990. Cathodoluminescence determination of the temperature rise in CdS under an electron beam spot. Philosophical. Magazine. Part B. 62 (3):329–36. doi:10.1080/13642819008208633
  • Chen, G. 1996. Nonlocal and nonequilibrium heat conduction in the vicinity of nanoparticles. J. Heat. Trans. 118 (3):539–45. doi:10.1115/1.2822665
  • Chu, D., D. T. Bilir, R. F. W. Pease, and K. E. Goodson. 2002. Submicron thermocouple measurements of electron-beam resist heating. J. Vac. Sci. Tech. B 20 (6):3044–6. doi:10.1116/1.1523023
  • Chu, D., W.-K. Wong, K. E. Goodson, and R. F. W. Pease. 2003. Transient temperature measurements of resist heating using nanothermocouples. J. Vac. Sci. Tach. B 21 (6):2985–9. doi:10.1116/1.1624255
  • Johnson, J. B., and K. G. McKay. 1953. Secondary electron emission of crystalline MgO. Phys. Rev. 91 (3):582–7. doi:10.1103/PhysRev.91.582
  • Khan, M. I, S. D. Lubner, D. F. Ogletree, and C. Dames. 2018. Temperature dependence of secondary electron emission: A new route to nanoscale temperature measurement using scanning electron microscopy. 124 (19):195104.
  • Kim, K, W. Jeong, W. Lee, and P. Reddy, 2012. Ultra-high vacuum scanning thermal microscopy for nanometer resolution quantitative thermometry. ACS Nano 6 (5):4248–57.
  • Mirkarimi, P. B., D. G. Stearns, S. L. Baker, J. W. Elmer, D. W. Sweeney, and E. M. Gullikson. 2002. Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography. 91 (1):81–9. doi:10.1063/1.1419265
  • Mott, N. F., and P. Character. 1929. The scattering of fast electrons by atomic nuclei. Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical 124 (794):425–42.
  • Nouiri, A., S. Chaguetmi, and N. Belabed. 2006. Monte Carlo model of the temperature rise at a GaAs surface under an electron beam. Surf. Interface Anal. 38 (7):1153–7. doi:10.1002/sia.2372
  • Penn, D. R. 1987. Electron mean-free-path calculations using a model dielectric function. Phys. Rev. B Condens. Matter. 35 (2):482–6. doi:10.1103/physrevb.35.482
  • Pop, E., and K. E. Goodson. 2004. Thermal phenomena in nanoscale transistors. J. Elec. Pack. 128:1-7.
  • Randolph, S. J., J. D. Fowlkes, and PDJJoAP. Rack. 2005. Effects of heat generation during electron-beam-induced deposition of nanostructures. J.Appl. Phys. 97 (12):3216.
  • Schmidt, A. J., X. Chen, and GJRoSI. Chen. 2008. Pulse accumulation, radial heat conduction, and anisotropic thermal conductivity in pump-probe transient thermoreflectance. Rev. Sci. Instr. 79 (11):285.
  • Talmon, Y., and E. L. Thomas. 2011. Electron beam heating temperature profiles in moderately thick cold stage STEM/SEM specimens. J. Microsc. 113 (1):69–75. doi:10.1111/j.1365-2818.1978.tb00095.x
  • Weber, M. 1994. Scattering of non-relativistic electrons in tip structures. J. Phys. D, Appl. Phys. 27 (7):1363.
  • Zhang, P. 2023. Thermal effect of two adjacent nanospheres during electron irradiation. Physica, B. Condensed. Matter. 649:414457. doi:10.1016/j.physb.2022.414457
  • Zhang, P., and L. D. Zhang. 2020. Monte Carlo study on the temperature rise under electron irradiation. Int. J. Heat. Mass. Trans. 153:119637. doi:10.1016/j.ijheatmasstransfer.2020.119637
  • Zhang, P., and L. D. Zhang. 2021. Exploring the temperature rise under low-energy electron irradiation for various materials. Int. J. Therm. Sci. 161 (1):106714. doi:10.1016/j.ijthermalsci.2020.106714
  • Zhang, P., and L. D. Zhang. 2021. Relations between electron yield and temperature rise under low-energy electron irradiation for Au element. J. Microsc. 281 (3):255–64. doi:10.1111/jmi.12969
  • Zhang, P., H. Y. Wang, Y. G. Li, S. F. Mao, and Z. J. Ding. 2012. Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy. Scanning. 34 (3):145–50. p. doi:10.1002/sca.20288
  • Zhang, P., L. Zhang, R. F. Dambire, and Y. Zhang. 2021. Exploring the heat transfer for spherical nanoparticles under electron irradiation. Phys. Scr. 96 (9):095702–14pp. doi:10.1088/1402-4896/ac04de[ ]
  • Zhang, P., Z. Y. Ma, and D. M. Li. 2023. Study on the temperature effect on line-scan profile of. Phys. Scr. 98 (1):015705. doi:10.1088/1402-4896/aca634

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