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Integrated Ferroelectrics
An International Journal
Volume 240, 2024 - Issue 1
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Research Article

Study on Safe Working Condition of the Electrothermal U-Shaped Actuator

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Pages 199-208 | Received 02 Sep 2022, Accepted 09 Mar 2023, Published online: 08 Feb 2024

References

  • Y. Huang et al., Mems reliability review[J], IEEE Trans. Device Mater. Relib. 12 (2), 482 (2012). DOI: 10.1109/TDMR.2012.2191291.
  • W. Zhenlu et al., Modeling of multiphysics coupling and performance analysis of z-shaped electrothermal microactuator[J], Ferroelectrics 581 (1), 54 (2021). DOI: 10.1080/00150193.2021.1906114.
  • A. Thangavel et al., Modelling of chevron electrothermal actuator and its performance analysis[J], Microsyst. Technol. 24 (4), 1767 (2018). DOI: 10.1007/s00542-018-3791-8.
  • Z. Zhang et al., Closed-form modelling and design analysis of v- and z-shaped electrothermal microactuators[J], J. Micromech. Microeng. 27 (1), 015023 (2017). DOI: 10.1088/1361-6439/27/1/015023.
  • A. Pimpin, I. Charoenbunyarit, and W. Srituravanich, Material and performance characterization of z-shaped nickel electrothermal micro-actuators[J], Sens. Actuators, A 253, 49 (2017). (""): DOI: 10.1016/j.sna.2016.11.022.
  • A. Roy, M. Nabi, and N. Rahman, Finite element compatible matrix interpolation for parametric model order reduction of electrothermal microgripper[J], J. Comput. Des. Eng. 8 (6), 1622 (2021). DOI: 10.1093/jcde/qwab066.
  • T. Sciberras et al., Coupled finite element-finite volume multi-physics analysis of mems electrothermal actuators[J], Micromachines 13 (1), 8 (2021). DOI: 10.3390/mi13010008.
  • R. A. Conant, and R. S. Muller, Cyclic fatigue testing of surface-micromachined thermal actuators[C]//Proceedings of the, ASME International Mechanical Engineering Congress and Exposition. ASME Internation Mechanical Engineering Congress and Exposition, Anaheim: ASME, 1998., 273–277. DOI: 10.1115/IMECE1998-1254.
  • N. Paryab, H. Jahed, and A. Khajepour, Creep and fatigue failure in single - and double hot arm mems thermal actuators[J], J Fail. Anal. Preven. 9 (2), 159 (2009). DOI: 10.1007/s11668-009-9212-7.
  • Z. Wang et al., Movement characteristics analysis of bi-directional friction linear micro-motor driven by a set of micro-actuator[J], Mod. Phys. Lett. B 35 (27), 2140013 (2021). DOI: 10.1142/S0217984921400133.
  • Z. Wang, X. Shen, and X. Chen, Design, modeling, and characterization of a mems electrothermal microgripper[J], Microsyst. Technol. 21 (11), 2307 (2015). DOI: 10.1007/s00542-014-2404-4.
  • J. Zhang et al., Improvement procedure of temperature field for electrothermal microgripper with parallel beam[J], Sens. Actuators, A 341, 113579 (2022). DOI: 10.1016/j.sna.2022.113579.
  • X. J. Shen, and X. Y. Chen, Mechanical performance of a cascaded v-shaped electrothermal actuator[J], Int. J. Adv. Rob. Syst. 10 (11), 379 (2013). DOI: 10.5772/56786.
  • H. Chen et al., Analysis of the dynamic behavior of a v-shaped electrothermal microactuator[J], J. Micromech. Microeng. 30 (8), 085005 (2020). DOI: 10.1088/1361-6439/ab90cc.
  • P. Vargas-Chable et al., A modified u-shaped micro-actuator with a compliant mechanism applied to a microgripper[J], Actuators 8 (1), 28 (2019). DOI: 10.3390/act8010028.

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