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Articles

Control of subthreshold swing using an in situ PEALD nano-laminated IGZO/Al2O3 multi-channel structured TFT

Won-Bum LeeDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaView further author information
,
Yoon-Seo KimDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaView further author information
&
Jin-Seong ParkDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaCorrespondence[email protected]
ORCID Iconhttps://orcid.org/0000-0002-9070-5666View further author information
ORCID Icon
Pages 179-185 | Received 20 Mar 2023, Accepted 07 Aug 2023, Published online: 22 Aug 2023

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