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Journal of Information Display Volume 25, 2024 - Issue 2

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Control of subthreshold swing using an in situ PEALD nano-laminated IGZO/Al₂O₃ multi-channel structured TFT

Won-Bum LeeDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaView further author information

Yoon-Seo KimDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaView further author information

Jin-Seong ParkDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaCorrespondence[email protected]

https://orcid.org/0000-0002-9070-5666 View further author information

Pages 179-185 | Received 20 Mar 2023, Accepted 07 Aug 2023, Published online: 22 Aug 2023

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https://doi.org/10.1080/15980316.2023.2249244
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